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The Ni samples were electroformed from additive-free (AF) and saccharin-containing (SC) sulfamate solutions, respectively. In situ backscattered electron (BSE) imaging, electron backscatter diffraction (EBSD), and electron-probe microanalysis (EPMA) were used to investigate the effect of annealing on the deformation behaviors of the AF and SC samples. The results indicate that columnar grains of the...
The rapid microminiaturization of LSI chips has encouraged the need for similarly microminiaturizing the probes of probe cards, the parts used to inspect IC chips. In response to this need, a method of producing 3-dimensional microprobes is devised by etching a substrate in advance and then performing X-ray lithography. By examining and optimizing each part of the process, we produced a 3-dimensional...
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